全自动长轴轮廓仪

Full-automatic Long-axis Profiler

Main Parameter:See the table for details

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Full-automatic Long-axis Profiler



TECHNICAL PARAMETER

 


Item

Parameter

Measuring range

X-axis maximum measurement range

1550mm

Z1 (sensor)

20mm

Z column travel

750mm

Measuring accuracy

X axis measurement error

±(2.5+0.002L)μm ※

Z1 axis measurement accuracy

±(0.5+0.02H)μm ※

X axis

Straightness

0.8μm /100mm , 4μm/full   length

Resolution

0.5μm 

Z1 sensor

Type

Grating sensor

Resolution

0.05μm 

Worktable

Y direction adjustment

±10mm

Pendulum adjustment

±6°

Lifting V-iron range

200

Load capacity

750kg


Climbing angle

Upward 82°downward 89°

  L: measuring length  H: measuring height

Customized or OEM is available upon specific request.









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